

| 規(guī)格型號 | 對角線 d(mm) | 檢驗平板的精度等級 | |||||
| 000 | 00 | 0 | 1 | 2 | 3 | ||
| 檢驗平板平面度公差(um) | |||||||
| 160×100 | 189 | 1.5 | 2.5 | 5.0 | 10 | 
 | 
 | 
| 160×160 | 226 | 
 | 
 | 
 | 
 | 
 | |
| 250×160 | 297 | 3.0 | 5.5 | 11 | 
 | 
 | |
| 250×250 | 353 | 
 | 
 | 
 | 22 | 
 | |
| 400×250 | 472 | 
 | 6.0 | 12 | 24 | 
 | |
| 400×400 | 566 | 2.0 | 3.5 | 6.5 | 13 | 25 | 62 | 
| 630×400 | 746 | 
 | 7.0 | 14 | 28 | 70 | |
| 630×630 | 891 | 4.0 | 8.0 | 16 | 30 | 75 | |
| 800×800 | 1131 | 
 | 9.0 | 17 | 34 | 85 | |
| 1000×630 | 1182 | 2.5 | 4.5 | 
 | 18 | 35 | 87 | 
| 1000×1000 | 1414 | 5.0 | 10.0 | 20 | 39 | 96 | |
| 1250×1250 | 1768 | 3.0 | 6.0 | 11.0 | 22 | 44 | 111 | 
| 1600×1000 | 1887 | 
 | 12.0 | 23 | 46 | 115 | |
| 1600×1600 | 2262 | 3.5 
 | 6.5 | 13.0 | 26 | 52 | 130 | 
| 2500×1600 | 2968 | 8.0 | 16.0 | 32 | 64 | 158 | |
| 4000×2500 | 4717 | 
 | 
 | 
 | 46 | 92 | 228 | 
